الفهرس 
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Abstract
At present, all the systems are tending to miniaturization. Thanks to the great tech-
nological advance of the silicon industry, it enabled the development of not only the
electronic industry, but also the Micro-Electro-Mechanical Systems known as MEMS.
MEMS gyroscopes have a great advantage concerning size, power, cost and reliability
compared to other conventional mechanical and optical gyroscopes. Unfortunately, they
face a great challenge in achieving high performance for strategic applications such as
military and aerospace.
The performance limitation is mainly due the noise level of MEMS gyroscopes that limits
the sensitivity. Moreover, several nonidealities are caused by fabrication imperfections
and mismatch. Several efforts were exerted to achieve higher sensitivity but most of
them hit the design boundary of bandwidth-sensitivity relation. Moreover, some MEMS
structures are not fully modeled.
In this thesis, We summarize different beam theories for complete modeling of the four
effective vibrational eigen modes of Fish-Hook shaped spring. The author implemented
a new optimization algorithm for the design of Fish-Hook shaped spring. We Developed
a design tool using MATLAB for the design and optimization of tuning fork gyroscope
structure using Fish-Hook shaped spring.
On the system and structural level, The author introduces a novel mode of operation for
MEMS gyroscopes called ”Staggered Mode” that optimizes the bandwidth-sensitivity
relation. We added a modification on a decoupled gyroscope structure to adopt this
mode based on the previously modeled Fish-Hook MEMS spring.
For Fish-Hook Model verification, we designed and implemented a tuning fork MEMS
gyroscope. It was fabricated using SOIMUPS process provided by MEMSCAP occupy-
ing 4 × 4mm2. We tested the structure using Wayne Kerr 6500B precision impedance analyzer and vacuum chamber in Ain Shams University integrated circuits lab. The au-
thor compared the values calculated from the derived model to the finite element model
simulated results using ANSYS and the testing results. The derived model showed close
matching to the FEM within 1% to 3% while 5% to 10% to the testing results due to
die stresses and process nonidealities.
For the Staggered mode gyroscope, we designed and implemented the modified structure
that was later fabricated using SOIMUPS process occupying 2.7 × 4.4mm2. The testing
showed that the tuning has the capability not only to achieve a maximally flat band with
enhancement more than 40%, but even can tolerate in band ripples for wider bandwidth
while trading off the sensitivity.