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العنوان
Theoretical study of the mechanism of cathode sputtering due to ionic bombardment /
المؤلف
El-khadry, Mohamed Galal Mohamed.
هيئة الاعداد
باحث / محمد جلال محمد الخضرى
مشرف / ف. البديوى
مشرف / يوسف كردى
مشرف / م. بدوى
الموضوع
Sputtering (Physics). Ion bombardment.
تاريخ النشر
1975.
عدد الصفحات
65 p. :
اللغة
الإنجليزية
الدرجة
ماجستير
التخصص
الفيزياء الذرية والجزيئية ، وعلم البصريات
تاريخ الإجازة
1/1/1975
مكان الإجازة
جامعة عين شمس - كلية العلوم - الفيزياء
الفهرس
Only 14 pages are availabe for public view

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Abstract

This work deals with a theoretical investigation of the mechanism of the cathodic sputtering phenomenon. A phenomenological model has been previously proposed by Badawy (1972) discussing the various features of the phenomenon. His model is based on the transfer momentum theory between the incident ions and the metal atoms, and incorportes the mechanisms of interaction of sound wave packets with internal atoms of the cathode and the transfer of reflected momenta to surface atoms to cause their sputtering.