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Abstract This work deals with a theoretical investigation of the mechanism of the cathodic sputtering phenomenon. A phenomenological model has been previously proposed by Badawy (1972) discussing the various features of the phenomenon. His model is based on the transfer momentum theory between the incident ions and the metal atoms, and incorportes the mechanisms of interaction of sound wave packets with internal atoms of the cathode and the transfer of reflected momenta to surface atoms to cause their sputtering. |